The Challenge
- Calibration of optical EUV-components by a EUV light-source requires vacuum
- Calibration by light in visible regime can be done at atmospheric pressure
- But: visible light will show higher diffraction orders due to used grating
The Approach
- Prove that a tunable light source within the visible regime allows a substantial suppression of diffraction effects
- Collecting requirements
- Experimental setup on optical table
- Extensive characterization and documentation of the characteristics of the light source
- Perform extended optical simulations for verification
Result & Added Value
- Zemax simulation to characterize the properties of the optical design
- Proof and feasibility of concepts and simulations
- Evidence of substantial suppression of higher diffraction order
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